5356-83-2Relevant articles and documents
Silicon precursor, method for Preparation of the Same, and a silicon-containing dielectric film manufactured thereby
-
Paragraph 0159-0160, (2017/01/05)
The present invention relates to a silicon precursor, a producing method thereof, and a producing method of a silicon-containing dielectric film using the same and, more specifically, to a silicon precursor which shows excellent cohesion and high deposition rate at low temperatures due to high volatility, to a producing method thereof, and to a producing method of a silicon-containing dielectric film which has significantly improved mechanical strength and a dielectric constant by using the silicon precursor. The silicon precursor is represented by chemical formula 1.COPYRIGHT KIPO 2016
Substituent effects on the reactivity of the silicon-carbon double bond. Resonance, inductive, and steric effects of substituents at silicon on the reactivity of simple 1-methylsilenes
Leigh, William J.,Boukherroub, Rabah,Kerst, Corinna
, p. 9504 - 9512 (2007/10/03)
The reactivities of a series of substituted 1-methylsilenes RMeSi=CH2 (R = H, methyl, ethyl, t-butyl, vinyl, ethynyl, phenyl, trimethylsilyl, and trimethylsilymethyl) in hydrocarbon solvents have been investigated by far- UV (193-nm) laser flash photolysis techniques, using the corresponding 1- methylsilacyclobutane derivatives as silene precursors. Each of these silacyclobutanes yields ethylene and the corresponding silene, which can be trapped as the alkoxysilane RSiMe2OR' cleanly upon 193- or 214-nm photolysis in solution in the presence of aliphatic alcohols. UV absorption spectra and absolute rate constants for reaction of the silenes with methanol, ethanol, and t-butyl alcohol have been determined in hexane solution at 23°C. The rate constants vary from a low 3 x 107 M-1 s-1 for reaction of 1- methyl-1-trimethylsilylsilene with t-BuOH to a high of 1 x 1010 M-1 s- 1 for reaction of 1-ethynyl-1-methylsilene with MeOH. In several cases, rate constants have been determined for addition of the deuterated alcohols, and for addition of methanol over the 0-55°C range. Invariably, small primary deuterium kinetic isotope effects and negative Arrhenius activation energies are observed. These characteristics are consistent with a mechanism involving reversible formation of a silene-alcohol complex which collapses to alkoxysilane by unimolecular proton transfer from oxygen to carbon. Silene reactivity increases with increasing resonance electron-donating and inductive electron-withdrawing ability of the substituents at silicon and is significantly affected by steric effects within this series of compounds. This is suggested to be due to a combination of effects on both the degree of electrophilicity at silicon (affecting the rate constants for formation and reversion of the complex) and nucleophilicity at carbon (affecting the partitioning of the complex between product and free reactants). Two 1- methyl-1-alkoxysilacyclobutanes were also investigated, but proved to be inert to 193-nm photolysis.
Alkoxylation of C-chlorovinylsilanes
Lakhtin, V. G.,Ryabkov, V. L.,Polyakova, M. V.,Nosova, V. M.,Kisin, A. V.,Chernyshev, E. A.
, p. 718 - 723 (2007/10/02)
The alkoxylation and isopropylideneiminoxylation of C-chlorovinylmethylchlorosilanes with various alcohols and acetone oxime were investigated.A series of new C-chlorovinylmethylalkoxy- and isopropylideneiminoxysilanes was characterized by IR and new 1H NMR spectra.The effect of the number of chlorine atoms in C-chlorovinylmethylchlorosilanes on their reactivity in these reactions was determined. - Key words: C-chlorovinylmethylchlorosilanes, etherification; C-chlorovinylmethylalkoxysilanes, alcohols, IR spectra; 1H NMR spectra.
Method of preparing trialkyl organo-oxysilanes
-
, (2008/06/13)
A method for the continuous or batch preparation of trialkyl organo-oxysilanes by reaction of organic hydroxy compounds with trialkyl halogen silanes in the absence of acid-binding substances is disclosed. The organic hydroxy compound is added directly to the trialkoxy halogen silane in an amount which corresponds to no more than the stoichiometrically necessary amount. The trialkyl halogen silane, or the resultant mixture is always at the boiling temperature or above the boiling temperature in the gaseous state. The reaction mixture is subjected, no later than toward the end of the reaction, to a column distillation in which the column temperature is held such that the reaction is carried to the end within the column. In continuous operation, the trialkyl halogen silane is introduced in gaseous form into the bottom of a column and either kept under reflux or introduced into a reactor into which corresponding stoichiometric amounts of organic hydroxy compound are simultaneously introduced. In the column, either a raw product or freshly introduced organic hydroxy compound in liquid form flows against the gaseous trialkyl halogen silane, and the desired trailkyl organo-oxysilane collects at ebullition on the floor of the column and is continuously removed.
